Paper
11 March 2008 Extreme ultraviolet multilayer mirrors for astronomical observation
Zhanshan Wang, Jingtao Zhu, Rui Chen, Jing Xu, Fengli Wang, Zhong Zhang, Jing Xu, Wenjuan Wu, Liqin Liu, Huijing Zhang, Da Xu, Hui Jiang, Lingyan Chen, Hongjun Zhou, Tonglin Huo, Mingqi Cui, Yidong Zhao
Author Affiliations +
Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 698433 (2008) https://doi.org/10.1117/12.792386
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China
Abstract
Multilayer mirrors are the important optical elements for astronomical observation at extreme ultraviolet region. In this article, three kinds of multilayer mirrors were introduced for solar observation and magnetosphere observation. Mo/Si multilayer mirror was fabricated for solar Fe-XII emission line at wavelength of 19.5nm. For solar He-II radiation at 30.4 nm, Mo/Si, Si/SiC, Si/C, Si/B4C and Mg/SiC multilayers were investigated, and the measurements results shows that Mg/SiC multilayer provides the highest reflectivity of 43.8% at incidence angle of 5 degree. The third multilayer mirror was a dual-function mirror used for earth's magnetosphere observation, which requires high-reflective for He-II emission line at wavelength of 30.4nm but anti-reflectance at 58.4nm from ionosphere He-I emission. Using aperiodic Mg/SiC multilayer, the dual-function multilayer mirror was designed. Compared to periodic multilayer, the dual-function multilayer suppresses the reflectivity for He-I at 58.4nm from 2.2% to 0.1%, without loss of the reflection for He-II at 30.4nm, significantly.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhanshan Wang, Jingtao Zhu, Rui Chen, Jing Xu, Fengli Wang, Zhong Zhang, Jing Xu, Wenjuan Wu, Liqin Liu, Huijing Zhang, Da Xu, Hui Jiang, Lingyan Chen, Hongjun Zhou, Tonglin Huo, Mingqi Cui, and Yidong Zhao "Extreme ultraviolet multilayer mirrors for astronomical observation", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 698433 (11 March 2008); https://doi.org/10.1117/12.792386
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KEYWORDS
Mirrors

Reflectivity

Multilayers

Extreme ultraviolet

Sputter deposition

Silicon

Astronomy

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