Characterization of MEMS cantilevers using lensless digital holographic microscope

Vijay Raj Singh; Alexandru Andrei; Christophe Gorecki; Lukasz Nieradko; Anand Asundi

doi:10.1117/12.782981

25 April 2008 Characterization of MEMS cantilevers using lensless digital holographic microscope

Vijay Raj Singh, Alexandru Andrei, Christophe Gorecki, Lukasz Nieradko, Anand Asundi

Proceedings Volume 6995, Optical Micro- and Nanometrology in Microsystems Technology II; 69950F (2008) https://doi.org/10.1117/12.782981
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

In this paper vibration characterization of MEMS cantilevers are presented using lens-less in-line digital holographic microscope (LDHM). In-line digital holography provides larger information capability with higher phase sensitivity, and full CCD sensor area is utilized for real image reconstruction. In lensless in-line digital holographic microscope, a highly diverging beam replaces the conventional microscope objectives to provide the required magnification. The diverging wave geometry also reduces the effect of twin-image wave caused by the in-line holographic geometry. For vibration analysis, the time averaged holograms were recorded corresponding to different vibration states of the cantilevers. Direct numerical evaluation of the amplitude and phase information from single time averaged hologram provides the full-field real time quantitative analysis. The experimental study of vibration measurements of Aluminum nitride (AlN) driven cantilevers is performed. The full field study shows the simultaneous vibration behavior of many cantilevers corresponding to same input conditions. Our study shows the shift in the resonant condition of cantilevers both for first and second resonant frequencies. This kind of analysis is most suitable to optimize and monitoring the fabrication process of cantilevers.

Citation Download Citation

Vijay Raj Singh, Alexandru Andrei, Christophe Gorecki, Lukasz Nieradko, and Anand Asundi "Characterization of MEMS cantilevers using lensless digital holographic microscope", Proc. SPIE 6995, Optical Micro- and Nanometrology in Microsystems Technology II, 69950F (25 April 2008); https://doi.org/10.1117/12.782981

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available