A plane wave diffraction on a pin-hole in a film with a finite thickness and real electrodynamic properties

Nikolay I. Chkhalo; Illarion A. Dorofeev; Nikolay N. Salashchenko; Mikhail N. Toropov

doi:10.1117/12.802354

29 April 2008 A plane wave diffraction on a pin-hole in a film with a finite thickness and real electrodynamic properties

Nikolay I. Chkhalo, Illarion A. Dorofeev, Nikolay N. Salashchenko, Mikhail N. Toropov

Author Affiliations +

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 702507 (2008) https://doi.org/10.1117/12.802354
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

On a base of the Kirchhoff-Helmholtz method and using the Green function for a half-space which is covered by a film of any thickness and with arbitrary optical properties, amplitude-phase characteristics of diffracted on a pin-hole field were calculated. Analysis was carried out for some materials of the film at radiation wave-length λ₀=633 nm using experimental values of the dielectric constants. The diffracted wave front has deformations which dependent on the film thickness and material electrodynamic characteristics, and the observation angle. The deformation determined by the film thickness essentially limits an accuracy provided by point diffraction interferometers.

Citation Download Citation

Nikolay I. Chkhalo, Illarion A. Dorofeev, Nikolay N. Salashchenko, and Mikhail N. Toropov "A plane wave diffraction on a pin-hole in a film with a finite thickness and real electrodynamic properties", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702507 (29 April 2008); https://doi.org/10.1117/12.802354

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