Damage analysis of EUV mask under Ga focused ion beam irradiation

Yasushi Nishiyama; Tsuyoshi Amano; Hiroyuki Shigemura; Tsuneo Terasawa; Osamu Suga; Tomokazu Kozakai; Syuichi Kikuchi; Kensuke Shiina; Anto Yasaka; Ryoji Hagiwara

doi:10.1117/12.793026

19 May 2008 Damage analysis of EUV mask under Ga focused ion beam irradiation

Yasushi Nishiyama, Tsuyoshi Amano, Hiroyuki Shigemura, Tsuneo Terasawa, Osamu Suga, Tomokazu Kozakai, Syuichi Kikuchi, Kensuke Shiina, Anto Yasaka, Ryoji Hagiwara

Author Affiliations +

Proceedings Volume 7028, Photomask and Next-Generation Lithography Mask Technology XV; 70280J (2008) https://doi.org/10.1117/12.793026
Event: Photomask and NGL Mask Technology XV, 2008, Yokohama, Japan

Abstract

EUV mask damage caused by Ga focused ion beam irradiation during the mask defect repair was studied. The concentration of Ga atom implanted in the multilayer through the buffer layer was calculated by SRIM. The reflectivity of the multilayer was calculated from the Ga distribution below the capping layer surface. To validate the calculation, a multilayer sample was irradiated with Ga FIB, and then EUV reflectivity was measured. The measured reflectivity change was in good agreement with the calculated value. An aerial image of patterns with Ga implanted region was simulated. The impact of the estimated Ga absorption on the linewidth of 32 nm hp line pattern was found to be less than 1 nm.

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Yasushi Nishiyama, Tsuyoshi Amano, Hiroyuki Shigemura, Tsuneo Terasawa, Osamu Suga, Tomokazu Kozakai, Syuichi Kikuchi, Kensuke Shiina, Anto Yasaka, and Ryoji Hagiwara "Damage analysis of EUV mask under Ga focused ion beam irradiation", Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 70280J (19 May 2008); https://doi.org/10.1117/12.793026

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