Rough surface scatterometry of bodies with rotational symmetry

Cornelius Hahlweg; Hendrik Rothe

doi:10.1117/12.795891

29 August 2008 Rough surface scatterometry of bodies with rotational symmetry

Cornelius Hahlweg, Hendrik Rothe

Proceedings Volume 7065, Reflection, Scattering, and Diffraction from Surfaces; 70650H (2008) https://doi.org/10.1117/12.795891
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

Scatterometry of macroscopically plane surfaces with micro-roughness by using quasi-parallel illumination is widely investigated. Measuring light scatter from surfaces with a certain macroscopical curvature under the same conditions leads to the question of distinguishing the effects of micro-roughness from those of curvature in the resulting scatter distribution. This is especially true for micro-roughness far beyond the smooth surface criterion. For example, the scatter distribution of a cone with comparatively heavy traces of machining along a plane through the axis of symmetry will be wide-spread perpendicularly to that plane for both reasons, the scatter pattern of the machining marks and the curvature of the surface. To extract the desired scatter pattern, the curvature has to be compensated by means of additional optical systems. The current paper deals with theory and basic design approaches, which are to be continued in follow-up papers.

Citation Download Citation

Cornelius Hahlweg and Hendrik Rothe "Rough surface scatterometry of bodies with rotational symmetry", Proc. SPIE 7065, Reflection, Scattering, and Diffraction from Surfaces, 70650H (29 August 2008); https://doi.org/10.1117/12.795891

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