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Recent development of research on the nonlinearity of the heterodyne interferometers provides an approach to eliminate
the nonlinearity of heterodyne interferometer using a simple phase compensation system by rotating a polarizer which is
set up before the detector in the interferometer.[17] This paper shows the experiment results which proved its general
validity for elimination of the nonlinearity errors whether it is a first-order or a higher-order error. It explains which
accuracy can be expected and provides the application opportunities based on theoretical analyses and experiment results.
Wenmei Hou andWenbo Cui
"Advanced research on nonlinearity in heterodyne interferometer", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713302 (12 January 2009); https://doi.org/10.1117/12.807564
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Wenmei Hou, Wenbo Cui, "Advanced research on nonlinearity in heterodyne interferometer," Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713302 (12 January 2009); https://doi.org/10.1117/12.807564