Optical measurements are performed in coordinate metrology in a wide range of applications, ranging from large-scale
workpieces with dimensions of several meters down to microstructures with &mgr;m-dimensions, using a large number of
different measurement devices and sensors. These different devices and sensors must be tested to check their compliance
with the specifications, to trace back the measurement results and to compare different devices. Thus, appropriate
procedures and measurement standards (artefacts) are necessary. We present test procedures and artefacts for optical
measurement systems similar to the well-known test procedures for classical tactile coordinate measuring machines
(CMMs) according to the international standard ISO 10360. It is important that the surface characteristic of the
artefacts is cooperative to the sensor. Appropriate artefacts were realized and tested. The main focus of this paper is on
micro-artefacts. Furthermore, task-related standards to trace back specific measurement tasks were developed. By means
of micro-contour artefacts, the measurement characteristics on critical geometries can be evaluated and compared. By
means of a micro-gear standard, the measurement uncertainty on micro-planetary gear can be evaluated. The
measurement deviations of measurement systems in the automotive industry can be determined with the special artefacts
to test sensors for inline measurements.
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