Phase retrieval based wavefront sensing experimental implementation and wavefront sensing accuracy calibration

Heng Mao; Xiao Wang; Dazun Zhao

doi:10.1117/12.828604

20 May 2009 Phase retrieval based wavefront sensing experimental implementation and wavefront sensing accuracy calibration

Heng Mao, Xiao Wang, Dazun Zhao

Author Affiliations +

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72830L (2009) https://doi.org/10.1117/12.828604
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

As a wavefront sensing (WFS) tool, Baseline algorithm, which is classified as the iterative-transform algorithm of phase retrieval, estimates the phase distribution at pupil from some known PSFs at defocus planes. By using multiple phase diversities and appropriate phase unwrapping methods, this algorithm can accomplish reliable unique solution and high dynamic phase measurement. In the paper, a Baseline algorithm based wavefront sensing experiment with modification of phase unwrapping has been implemented, and corresponding Graphical User Interfaces (GUI) software has also been given. The adaptability and repeatability of Baseline algorithm have been validated in experiments. Moreover, referring to the ZYGO interferometric results, the WFS accuracy of this algorithm has been exactly calibrated.

Citation Download Citation

Heng Mao, Xiao Wang, and Dazun Zhao "Phase retrieval based wavefront sensing experimental implementation and wavefront sensing accuracy calibration", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72830L (20 May 2009); https://doi.org/10.1117/12.828604

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