Interferometric imaging ellipsometry: fundamental study

Seichi Sato; Shigeru Ando

doi:10.1117/12.825198

21 August 2009 Interferometric imaging ellipsometry: fundamental study

Seichi Sato, Shigeru Ando

Proceedings Volume 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III; 74050F (2009) https://doi.org/10.1117/12.825198
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

A new type of spectroscopic ellipsometry is proposed for imaging optical properties of non-uniform thin films. Unlike conventional spectroscopic ellipsometers, the ellipsometer is neither based on a monochromator nor a spectrometer. By using broad-band light source and white-light interference technique, the ellipsometry system efficiently illuminates the sample and enables us to detect reflected light with a CCD or CMOS image sensor. Therefore fast imaging ellipsometry is realized over wide spectral range. In this study, we built simple imaging ellipsometer based on P-S-A (polarizer-sample-analyzer) configuration and show fundamental experimental results.

Citation Download Citation

Seichi Sato and Shigeru Ando "Interferometric imaging ellipsometry: fundamental study", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050F (21 August 2009); https://doi.org/10.1117/12.825198

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available