PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The growth of crystalline 1D nanowires of semiconductors on non-epitaxial surfaces holds the promise to overcome
many of the current challenges of heteroepitaxial material synthesis and device fabrication for a wide range of electronic
and photonic applications. Nano-heteroepitaxial bridging of CVD grown nanowires potentially enables a low cost and
mass-manufacturable approach to nanowire based device fabrication. Here we report the synthesis and bridging of lateral
silicon nanowires between a pair of vertical non-single crystal surfaces and application of this technique in the design
and fabrication of waveguide-integrated photodetectors. The device consists of a number of 1D nanowires laterally
grown across gaps etched into rib optical waveguides with an amorphous silicon oxynitride core and silicon oxide
claddings. A pair of phosphorous-doped polysilicon electrodes was deposited on the walls of the waveguide gap for
electrical interfacing of the nanowires to collect the photocurrent under optical excitation. Characterization results
demonstrated good waveguide characteristics, high electrical isolation between the electrodes, low leakage current and
distinct photoresponse from the bridged nanowires. This implementation of silicon nanowires on polysilicon combines
the characteristics of crystalline 1D nanowires with the flexible fabrication processes on non-single-crystal silicon
platforms facilitating advances in silicon photonics and beyond.
Sonia Grego,Kristin H. Gilchrist,Ja-Yeon Kim,Min-Ki Kwon, andM. Saif Islam
"Waveguide-integrated nanowire photoconductors on a non-single crystal surface", Proc. SPIE 7406, Nanoepitaxy: Homo- and Heterogeneous Synthesis, Characterization, and Device Integration of Nanomaterials, 74060B (3 September 2009); https://doi.org/10.1117/12.825260
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Sonia Grego, Kristin H. Gilchrist, Ja-Yeon Kim, Min-Ki Kwon, M. Saif Islam, "Waveguide-integrated nanowire photoconductors on a non-single crystal surface," Proc. SPIE 7406, Nanoepitaxy: Homo- and Heterogeneous Synthesis, Characterization, and Device Integration of Nanomaterials, 74060B (3 September 2009); https://doi.org/10.1117/12.825260