Optical metrology for template and disk patterned imprints

Roman Sappey; Art Jenkins; Sri Venkataram

doi:10.1117/12.833285

23 September 2009 Optical metrology for template and disk patterned imprints

Roman Sappey, Art Jenkins, Sri Venkataram

Proceedings Volume 7488, Photomask Technology 2009; 74881X (2009) https://doi.org/10.1117/12.833285
Event: SPIE Photomask Technology, 2009, Monterey, California, United States

Abstract

Driven by the ever-growing storage density needs, the hard-disk drive (HDD) industry is transitioning to patterned magnetic media. For the first time, magnetic media disk production will require advanced lithography and critical dimension (CD) process control. The CDs of patterned media features will have to be smaller than the most advanced semiconductor design rules, and nano-imprint lithography (NIL) is the only candidate to yield such small dimensions at the low cost the industry demands. After an introduction to the industry's drivers for the transition, we give a summary of the NIL process for HDD media production, and an estimate of the CD metrology requirements for future process control. We then present some arguments and results to illustrate how a spectroscopic ellipsometry based scatterometry technique could be a good candidate to meet the CD control requirements of the patterned media roadmap. Simulations and experimental results on several DTM structures, for both template and disk imprints are discussed.

Citation Download Citation

Roman Sappey, Art Jenkins, and Sri Venkataram "Optical metrology for template and disk patterned imprints", Proc. SPIE 7488, Photomask Technology 2009, 74881X (23 September 2009); https://doi.org/10.1117/12.833285

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available