Surface Roughness Measurements Using A Nomarski Type Scanning Instrument

Thomas C. Bristow; Kevork Arackellian

doi:10.1117/12.939849

20 April 1987 Surface Roughness Measurements Using A Nomarski Type Scanning Instrument

Thomas C. Bristow, Kevork Arackellian

Proceedings Volume 0749, Metrology: Figure and Finish; (1987) https://doi.org/10.1117/12.939849
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States

Abstract

This paper presents surface roughness measurements for a variety of surfaces using an automated Nomarski type profiling instrument. The instrument provides a quantitative measure of the surface slope and surface roughness of a surface. The vertical resolution of the Nomarski technique allows surface height evaluation with a resolution of one Angstrom and a lateral resolution of approximately one micron. A scan length of up to 100 millimeters can be used. The profiling instrument measures slope and calculates the surface profile. Both slope and profile descriptions of the surface are useful in examining the topography of the surface. Examples of the surfaces presented include a laser gyro mirror and a diamond turned mirror. Statistical surface parameters are shown for these surfaces, including the power spectrum and the autocovariance function. The statistical parameters are calculated from the both the slope and profile data with a comparison of the results.

Citation Download Citation

Thomas C. Bristow and Kevork Arackellian "Surface Roughness Measurements Using A Nomarski Type Scanning Instrument", Proc. SPIE 0749, Metrology: Figure and Finish, (20 April 1987); https://doi.org/10.1117/12.939849

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