Fabrication and characterization of 1.3-&#956;m InAs quantum-dot VCSELs and monolithic VCSEL arrays

Y. Ding; W. J. Fan; D. W. Xu; L. J. Zhao; Y. Liu; N. H. Zhu

doi:10.1117/12.852114

25 November 2009 Fabrication and characterization of 1.3-μm InAs quantum-dot VCSELs and monolithic VCSEL arrays

Y. Ding, W. J. Fan, D. W. Xu, L. J. Zhao, Y. Liu, N. H. Zhu

Proceedings Volume 7631, Optoelectronic Materials and Devices IV; 763102 (2009) https://doi.org/10.1117/12.852114
Event: Asia Communications and Photonics, 2009, Shanghai, Shanghai , China

Abstract

We present fabrication and characterization of 1.3-μm InAs quantum dot (QD) vertical cavity surface emitting lasers (VCSELs) and QD-VCSEL arrays. The continuous-wave (CW) output power of single QD-VCSEL of 1.2 mW with lasing wavelength of 1.28 μm is obtained at room temperature (RT) at a bias current of 15 mA without power saturation. The low threshold current of 1.1 mA can be achieved for the single mode device. We investigate the 3-dB modulation bandwidth of QD-VCSELs with oxide aperture size of 5-μm, 10-μm and 15-μm in the small signal frequency response measurements. Modulation bandwidth of 2.65 GHz is achieved for single-mode QD-VCSEL with oxide aperture size of 5 μm at a bias current of 4.5 mA. The maximum modulation bandwidth of 2.5 GHz can be obtained for multimode QD-VCSEL with oxide aperture size of 10 μm at a bias current of 7 mA. The 61 QD-VCSELs array is also investigated at RT without optimization. Maximum CW output power of 28 mW and pulsed output power of 18 mW are demonstrated for 2-D QD-VCSEL array with threshold current of 50 mA. The far field pattern beam angle of QD-VCSEL arrays at two perpendicular directions are about 18 degree.

Citation Download Citation

Y. Ding, W. J. Fan, D. W. Xu, L. J. Zhao, Y. Liu, and N. H. Zhu "Fabrication and characterization of 1.3-μm InAs quantum-dot VCSELs and monolithic VCSEL arrays", Proc. SPIE 7631, Optoelectronic Materials and Devices IV, 763102 (25 November 2009); https://doi.org/10.1117/12.852114

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