Novel fine-tuned model-based SRAF generation method using coherence map

Katsuyoshi Kodera; Satoshi Tanaka; Mikiyasu Yamaji; Chikaaki Kodama; Toshiya Kotani; Shigeki Nojima; Koji Hashimoto; Shoji Mimotogi; Soichi Inoue

doi:10.1117/12.846322

10 March 2010 Novel fine-tuned model-based SRAF generation method using coherence map

Katsuyoshi Kodera, Satoshi Tanaka, Mikiyasu Yamaji, Chikaaki Kodama, Toshiya Kotani, Shigeki Nojima, Koji Hashimoto, Shoji Mimotogi, Soichi Inoue

Author Affiliations +

Proceedings Volume 7640, Optical Microlithography XXIII; 764017 (2010) https://doi.org/10.1117/12.846322
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

We have developed the comprehensive sub-resolution assist features (SRAFs) generation method based upon the modulation of the coherence map. The method has broken through the trade-off relation between processing time and accuracy of the SRAF generation. We have applied this method to a real device layout and the average of Process Variation band width (PV band width) has improved to 40% without any processing time loss.

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Katsuyoshi Kodera, Satoshi Tanaka, Mikiyasu Yamaji, Chikaaki Kodama, Toshiya Kotani, Shigeki Nojima, Koji Hashimoto, Shoji Mimotogi, and Soichi Inoue "Novel fine-tuned model-based SRAF generation method using coherence map", Proc. SPIE 7640, Optical Microlithography XXIII, 764017 (10 March 2010); https://doi.org/10.1117/12.846322

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