Paper
5 May 2010 A hybrid energy model for extracting boundaries of multiple overlapped objects on images
Author Affiliations +
Abstract
One of widely used methods to extract boundaries of objects in the image is the contour method based on the energy models. Two well known energy models are the edge based and the region based model. Although each of the two models works well with its own advantage, it has difficulty in the following situation: When the initial point the contour evolving starts from is not located properly in the inside region of an object or some objects are partially overlapped so that the intensity difference between boundary pixels on the overlapped area and their neighbors becomes relatively small, the edge based model approach fails to produce good results. On the other hand, the region based model approach fails to produce good results when more than two objects with different intensity averages exist. To overcome such difficulty, we suggest the hybrid energy model approach constructed partially from each of the two approaches. In this approach, some initial point the contour evolving starts from is randomly selected from the image. From the selected initial point the contour starts evolving until it meets the boundary of either some object or background. Once the boundary of one object or background is found, its region is removed from the image. On the rest of the image, the same procedure is repeated until the boundaries of all objects and background are found. The suggested approach is illustrated using SEM images of semiconductor wafers.
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Janghee Lee and Suk I. Yoo "A hybrid energy model for extracting boundaries of multiple overlapped objects on images", Proc. SPIE 7723, Optics, Photonics, and Digital Technologies for Multimedia Applications, 77231L (5 May 2010); https://doi.org/10.1117/12.854125
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KEYWORDS
Image segmentation

Statistical modeling

Scanning electron microscopy

Data modeling

Feature extraction

Semiconducting wafers

Image processing

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