We report a successful fabrication and testing of the first set of Platinum (Pt)-coated Kirkpatrik-Baez (KB) mirrors for a
submicrofocusing x-ray polychromatic beam from a conventional beamline (64 m long) at the 34-ID of Advanced
Photon Source (APS). The set includes one 80 mm long mirror and one 40 mm short mirror fabricated by depositing Pt
on finely polished spherical Silicon (Si) substrates using the APS-developed profile coating technique with the
magnetron sputtering system. Profile coating masks were calculated through the coating profile data from metrology
measurements acquired using interferometric stitching technique. Instead of flat substrates, spherical substrates (with
shapes approximately mimicking the tangential profiles of the desired ellipses) were used, reducing the coating thickness
and, thus, stress. The mirror pair was commissioned on the beamline and generated a 2-D spot with full width at half
maximum (FWHM) 280 nm (V) x 150 nm (H). The detailed fabrication methods, metrology measurements, and
calculations are discussed.
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