The 3D buried optical splitter under non-uniform electric field

Zigang Zhou; Yi Xiao; Li Zhu; Chen Luo

doi:10.1117/12.868178

17 November 2010 The 3D buried optical splitter under non-uniform electric field

Zigang Zhou, Yi Xiao, Li Zhu, Chen Luo

Proceedings Volume 7847, Optoelectronic Devices and Integration III; 78471J (2010) https://doi.org/10.1117/12.868178
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

A electric field technique was developed to fabricate 1×4 buried channel waveguides on optical glass. The 40V voltage was applied on the glass to accelerate the exchange of sodium ions in the glass and cesium ions in the salt melt. As a result, the optical loss of 0.1dB/cm was obtained for channel waveguides of 20μm depth with the 1.550μm laser, and a 3D buried channel waveguide is produced by the non-uniform field ion exchange under 1μm height inclined on glass.

Citation Download Citation

Zigang Zhou, Yi Xiao, Li Zhu, and Chen Luo "The 3D buried optical splitter under non-uniform electric field", Proc. SPIE 7847, Optoelectronic Devices and Integration III, 78471J (17 November 2010); https://doi.org/10.1117/12.868178

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