Paper
14 February 2011 Recent developments and future challenges for MEMS adaptive optics
Author Affiliations +
Proceedings Volume 7931, MEMS Adaptive Optics V; 793109 (2011) https://doi.org/10.1117/12.876475
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States
Abstract
The MEMS deformable mirror (DM) performances have been dramatically increased during the last years. Although adaptive optics has the potential to address many optical problems faced by engineers and scientists, it has not yet reached all domains of applications that it might reach. In this article, we present some key changes.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Rooms and J. Charton "Recent developments and future challenges for MEMS adaptive optics", Proc. SPIE 7931, MEMS Adaptive Optics V, 793109 (14 February 2011); https://doi.org/10.1117/12.876475
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Cited by 1 scholarly publication.
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KEYWORDS
Adaptive optics

Deformable mirrors

Actuators

Wavefronts

Microelectromechanical systems

Mirrors

Sensors

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