Characterization of a nanocoating using a MEMS tribogauge

Ashwin Vijayasai; Gautham Ramachandran; Ganapathy Sivakumar; Charlie Anderson; Richard Gale; Tim Dallas

doi:10.1117/12.909335

15 February 2012 Characterization of a nanocoating using a MEMS tribogauge

Ashwin Vijayasai, Gautham Ramachandran, Ganapathy Sivakumar, Charlie Anderson, Richard Gale, Tim Dallas

Proceedings Volume 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI; 82500C (2012) https://doi.org/10.1117/12.909335
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

A chemisorbed fluorocarbon self-assembled monolayer (FSAM) layer on MEMS surfaces can greatly improve MEMS device reliability by reducing the in-use stiction force. In this work, a MEMS tribogauge that measures stiction force between two interacting surfaces has been used for FSAM coating and process parameter characterization. A commercially available nanocoating tool was used for depositing FSAM coatings. Five different coating recipes with different injection times for the FSAM precursor were evaluated with the tribogauge. The interacting surfaces of the tribogauge were exposed to many load cycles. These experiments allowed a preferred process to be determined.

Citation Download Citation

Ashwin Vijayasai, Gautham Ramachandran, Ganapathy Sivakumar, Charlie Anderson, Richard Gale, and Tim Dallas "Characterization of a nanocoating using a MEMS tribogauge", Proc. SPIE 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, 82500C (15 February 2012); https://doi.org/10.1117/12.909335

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