Analysis of the diffraction wave from pinhole in point diffraction interferometer

Rulin Wang; Lixia Zhang; Tingwen Xing

doi:10.1117/12.970627

15 October 2012 Analysis of the diffraction wave from pinhole in point diffraction interferometer

Rulin Wang, Lixia Zhang, Tingwen Xing

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 841721 (2012) https://doi.org/10.1117/12.970627
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Pinhole is a key component of the point diffraction interferometer (PDI), therefore the production precision of pinhole will affect the detection accuracy of interferometer seriously. While the incident light wave is visible(λ=632.8nm) and material is Cr, Root mean square(RMS) of far-field diffraction wave-front errors can be counted by analysis of impacts of the hole diameter, ovality and material thickness to diffraction wave. The simulation results show that we can get data of far-field from near-field data which are calculated by FDTD algorithm, and the data of far-field based on vector diffraction theory are different from that based on scalar diffraction theory. Wave-front quality of far-field diffraction wave does not vary with the hole diameter monotonicly. RMS of diffraction wave-front errors will be 10^-7λ while the pinhole diameter is submicron. RMS of diffraction wave-front errors change little with material thickness. The pinhole shows waveguide characteristics while its diameter is less than 200nm. When the incident light polarization directions are different, RMS vary with the pinhole ovality.

Citation Download Citation

Rulin Wang, Lixia Zhang, and Tingwen Xing "Analysis of the diffraction wave from pinhole in point diffraction interferometer", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841721 (15 October 2012); https://doi.org/10.1117/12.970627

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