Novel diffraction gratings fabricated by means of plasma nanotechnologies

N. Ebizuka; Makoto Sekine; K. Ishikawa; H. Kondo; M. Hori; M. Sasaki; A. Bianco; F. Maria Zerbi; Y. Hirahara; W. Aoki

doi:10.1117/12.925869

13 September 2012 Novel diffraction gratings fabricated by means of plasma nanotechnologies

N. Ebizuka, Makoto Sekine, K. Ishikawa, H. Kondo, M. Hori, M. Sasaki, A. Bianco, F. Maria Zerbi, Y. Hirahara, W. Aoki

Proceedings Volume 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II; 84502Y (2012) https://doi.org/10.1117/12.925869
Event: SPIE Astronomical Telescopes + Instrumentation, 2012, Amsterdam, Netherlands

Abstract

A volume phase holographic grating (VPHG) achieves very high diffraction efficiency up to 100% for S or P polarized light at the first diffraction order. However, diffraction efficiency of the VPHG for non-polarized light becomes low according as Bragg angle becomes large, and bandwidth of diffraction efficiency becomes narrow according as refractive index modulation of grating lattice becomes small. A volume binary grating with rectangular lattice, consists of high and low refractive index media with large or small duty ratio, is able to achieve very high efficiency nearly 100% and a wide band width for both S and P polarization light. We have successfully fabricated germanium immersion gratings of step groove shape with resolving power of 45,000 at 10 micron by using a nano-precision 3D grinding machine and ELID (ELectrolytic In-process Dressing) method. However, the method requires a large amount of machine times and efforts. We had proposed a novel immersion grating with slot shape lattice of total reflection mirrors, which achieves high performance and lower fabrication cost. We describe the photolithography and the latest plasma nano-technologies for fabrications of the novel diffraction gratings in our presentation. We also introduce birefringence volume gratings in this article.

Citation Download Citation

N. Ebizuka, Makoto Sekine, K. Ishikawa, H. Kondo, M. Hori, M. Sasaki, A. Bianco, F. Maria Zerbi, Y. Hirahara, and W. Aoki "Novel diffraction gratings fabricated by means of plasma nanotechnologies", Proc. SPIE 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II, 84502Y (13 September 2012); https://doi.org/10.1117/12.925869

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Diffraction gratings

Diffraction

Refractive index

Polarization

Modulation

Spectrographs

Binary data

Show All Keywords

Keywords/Phrases

Search In:

Publication Years