UV photon-counting CCD detectors that enable the next generation of UV spectroscopy missions: AR coatings that can achieve 80-90% QE

Erika T. Hamden; Frank Greer; David Schiminovich; Shouleh Nikzad; D. Christopher Martin

doi:10.1117/12.927208

25 September 2012 UV photon-counting CCD detectors that enable the next generation of UV spectroscopy missions: AR coatings that can achieve 80-90% QE

Erika T. Hamden, Frank Greer, David Schiminovich, Shouleh Nikzad, D. Christopher Martin

Author Affiliations +

Proceedings Volume 8453, High Energy, Optical, and Infrared Detectors for Astronomy V; 845309 (2012) https://doi.org/10.1117/12.927208
Event: SPIE Astronomical Telescopes + Instrumentation, 2012, Amsterdam, Netherlands

Abstract

We describe recent progress in the development of anti-reflection coatings for use at UV wavelengths on CCDs and other Si-based detectors. We have previously demonstrated a set of coatings which are able to achieve greater than 50% QE in 4 bands from 130nm to greater than 300nm. We now present new refinements of these AR-coatings which will improve performance in a narrower bandpass by 50% over previous work. Successful test films have been made to optimize transmission at 190nm, reaching 80% potential transmission.

Citation Download Citation

Erika T. Hamden, Frank Greer, David Schiminovich, Shouleh Nikzad, and D. Christopher Martin "UV photon-counting CCD detectors that enable the next generation of UV spectroscopy missions: AR coatings that can achieve 80-90% QE", Proc. SPIE 8453, High Energy, Optical, and Infrared Detectors for Astronomy V, 845309 (25 September 2012); https://doi.org/10.1117/12.927208

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