Paper
19 October 2012 Adjustable grazing incidence x-ray optics based on thin PZT films
Vincenzo Cotroneo, William N. Davis, Vanessa Marquez, Paul B. Reid, Daniel A. Schwartz, Raegan L. Johnson-Wilke, Susan E. Trolier-McKinstry, Rudeger H. T. Wilke
Author Affiliations +
Abstract
The direct deposition of piezoelectric thin films on thin substrates offers an appealing technology for the realization of lightweight adjustable mirrors capable of sub-arcsecond resolution. This solution will make it possible to realize X-ray telescopes with both large effective area and exceptional angular resolution and, in particular, it will enable the realization of the adjustable optics for the proposed mission Square Meter Arcsecond Resolution X-ray Telescope (SMART-X). In the past years we demonstrated for the first time the possibility of depositing a working piezoelectric thin film (1-5 um) made of lead-zirconate-titanate (PZT) on glass. Here we review the recent progress in film deposition and influence function characterization and comparison with finite element models. The suitability of the deposited films is analyzed and some constrains on the piezoelectric film performances are derived. The future steps in the development of the technology are described.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vincenzo Cotroneo, William N. Davis, Vanessa Marquez, Paul B. Reid, Daniel A. Schwartz, Raegan L. Johnson-Wilke, Susan E. Trolier-McKinstry, and Rudeger H. T. Wilke "Adjustable grazing incidence x-ray optics based on thin PZT films", Proc. SPIE 8503, Adaptive X-Ray Optics II, 850309 (19 October 2012); https://doi.org/10.1117/12.931228
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Cited by 11 scholarly publications.
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KEYWORDS
Actuators

Glasses

Mirrors

Ferroelectric materials

Sputter deposition

X-ray optics

Thin films

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