Fiber profilometer for measurement of hard-to-access areas

Zhuang Liu; Xia Yu; Qi Jie Wang; Shaw Wei Kok; Ying Zhang

doi:10.1117/12.2003784

22 February 2013 Fiber profilometer for measurement of hard-to-access areas

Zhuang Liu, Xia Yu, Qi Jie Wang, Shaw Wei Kok, Ying Zhang

Proceedings Volume 8603, High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II; 86030Z (2013) https://doi.org/10.1117/12.2003784
Event: SPIE LASE, 2013, San Francisco, California, United States

Abstract

A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is proposed to obtain an optimized lateral resolution. The performance of the profilometer system is demonstrated by experimental studies.

Citation Download Citation

Zhuang Liu, Xia Yu, Qi Jie Wang, Shaw Wei Kok, and Ying Zhang "Fiber profilometer for measurement of hard-to-access areas", Proc. SPIE 8603, High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II, 86030Z (22 February 2013); https://doi.org/10.1117/12.2003784

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