Widely tunable MEMS-VCSELs operating at > 70 degrees °C

Christian Gierl; Tobias Gründl; Karolina Zogal; Sujoy Paul; Christian Grasse; Gerhard Böhm; Peter Meissner; Markus-Christian Amann; Franko Küppers

doi:10.1117/12.2004364

13 March 2013 Widely tunable MEMS-VCSELs operating at > 70 °C

Christian Gierl, Tobias Gründl, Karolina Zogal, Sujoy Paul, Christian Grasse, Gerhard Böhm, Peter Meissner, Markus-Christian Amann, Franko Küppers

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Proceedings Volume 8639, Vertical-Cavity Surface-Emitting Lasers XVII; 86390G (2013) https://doi.org/10.1117/12.2004364
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

A mode hop free single mode tuning < 90nm at 40°C and 45nm at 70°C is demonstrated with a MEMS tunable VCSEL for the first time. The device shows a fiber-coupled output power of 2.9mW at 20°C and 0.5mW at 70°C. The side mode suppression ratio is larger than 40 dB over the entire tuning and temperature range of up to 70°C. The presented technology is cost effective and thus capable for mass production. It is applicable for tuneable VCSELs operating in different wavelength regimes, which are limited by the absorption of the DBR materials only.

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Christian Gierl, Tobias Gründl, Karolina Zogal, Sujoy Paul, Christian Grasse, Gerhard Böhm, Peter Meissner, Markus-Christian Amann, and Franko Küppers "Widely tunable MEMS-VCSELs operating at > 70 °C", Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 86390G (13 March 2013); https://doi.org/10.1117/12.2004364

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