Development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL

Masatoshi Echigo; Masako Yamakawa; Yumi Ochiai; Yu Okada; Takashi Makinoshima; Masaaki Takasuka

doi:10.1117/12.2010926

29 March 2013 Development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL

Masatoshi Echigo, Masako Yamakawa, Yumi Ochiai, Yu Okada, Takashi Makinoshima, Masaaki Takasuka

Proceedings Volume 8682, Advances in Resist Materials and Processing Technology XXX; 86821V (2013) https://doi.org/10.1117/12.2010926
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

In this paper, we report the development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL. The new xanthendiol derivatives were easily synthesized by the condensation of aldehydes and dihydroxyaromatic compounds. We found 13-biphenyl-13H-benzoxanthen-3,10-diol was showed the good applicability to the raw material for the resist for EB/EUVL. The EB patterning result showed the resist containing xanthendiol derivative could resolve the 30 nm half-pitch pattern. Furthermore sub 30 nm half-pitch patterns were partially resolved.

Citation Download Citation

Masatoshi Echigo, Masako Yamakawa, Yumi Ochiai, Yu Okada, Takashi Makinoshima, and Masaaki Takasuka "Development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL", Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, 86821V (29 March 2013); https://doi.org/10.1117/12.2010926

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available