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13 May 2013 Front Matter: Volume 8789
Proceedings Volume 8789, Modeling Aspects in Optical Metrology IV; 878901 (2013) https://doi.org/10.1117/12.2028772
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 8789, including the Title Page, Copyright Information, Table of Contents, and the Conference Committee listing.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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"Front Matter: Volume 8789", Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 878901 (13 May 2013); https://doi.org/10.1117/12.2028772
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KEYWORDS
Optical metrology
Scatterometry
Metrology
Modeling
Silver
Laser metrology
Current controlled current source
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