Extreme-Ultraviolet Multilayer Mirror Performance: Recent Test Results

R. C. Catura; E. G. Joki; T. E. Whittemore; W. J. Brookover; M. S. Giampapa

doi:10.1117/12.943971

18 May 1988 Extreme-Ultraviolet Multilayer Mirror Performance: Recent Test Results

R. C. Catura, E. G. Joki, T. E. Whittemore, W. J. Brookover, M. S. Giampapa

Proceedings Volume 0879, Sensing, Discrimination, and Signal Processing and Superconducting Materials and Intrumentation; (1988) https://doi.org/10.1117/12.943971
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

This paper describes some of our recent progress in laboratory research aimed at fabricating multilayers for imaging applications at EUV wavelengths. Some of the equipment available in our laboratory for multilayer research is described and results of some calculations that aided in design of the multilayers and in the selection of materials are discussed. Finally, the results of multilayer deposition on both flat substrates and figured optical surfaces are presented and the visible light test of a system for investigating the normal incidence imaging properties of multilayer optics is described.

Citation Download Citation

R. C. Catura, E. G. Joki, T. E. Whittemore, W. J. Brookover, and M. S. Giampapa "Extreme-Ultraviolet Multilayer Mirror Performance: Recent Test Results", Proc. SPIE 0879, Sensing, Discrimination, and Signal Processing and Superconducting Materials and Intrumentation, (18 May 1988); https://doi.org/10.1117/12.943971

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