Advance in dimensional measurements of nano-objects based on defocusing of the electron probe of a scanning electron microscope

M. N. Filippov; V. P. Gavrilenko; V. B. Mityukhlyaev; A. V. Rakov; P. A. Todua

doi:10.1117/12.2023056

20 September 2013 Advance in dimensional measurements of nano-objects based on defocusing of the electron probe of a scanning electron microscope

M. N. Filippov, V. P. Gavrilenko, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua

Author Affiliations +

Proceedings Volume 8819, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII; 88190D (2013) https://doi.org/10.1117/12.2023056
Event: SPIE NanoScience + Engineering, 2013, San Diego, California, United States

Abstract

New results for dimensional measurements of nanostructures obtained using the method of defocusing of the SEM electron probe are presented. The method is extended to nanostructures representing the protrusions of the trapezoidal form with the small size of the top base and the features (protrusions and trenches) with nearly vertical sidewalls. It is also shown that the method can be applied for measurements of geometric parameters of features located on resist masks as well as of individual nanoparticles.

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M. N. Filippov, V. P. Gavrilenko, V. B. Mityukhlyaev, A. V. Rakov, and P. A. Todua "Advance in dimensional measurements of nano-objects based on defocusing of the electron probe of a scanning electron microscope", Proc. SPIE 8819, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII, 88190D (20 September 2013); https://doi.org/10.1117/12.2023056

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