Femtosecond laser processing and spatial light modulator

Kimmo Paivasaari; Martti Silvennoinen; Jarno Kaakkunen; Pasi Vahimaa

doi:10.1117/12.2044459

6 March 2014 Femtosecond laser processing and spatial light modulator

Kimmo Paivasaari, Martti Silvennoinen, Jarno Kaakkunen, Pasi Vahimaa

Proceedings Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX; 89670F (2014) https://doi.org/10.1117/12.2044459
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

The use of the femtosecond laser enables generation of small spot sizes and ablation features. Ablation of the small features usually requires only a small amount of laser power to be delivered to the ablation spot. When using only a one beam for the ablation of the small features this process is bound to be time consuming. The spatial light modulator (SLM) together with the computer generated holograms (CGH) can be used for manipulating and shaping of the laser beam in various applications. In laser micromachining, when using laser with relatively high power, the original beam can be divided up to hundreds beams and still have the energy of the individual beam above the ablation threshold of the material. This parallel laser processing enables more efficient use of the laser power regardless of the machining task.

Citation Download Citation

Kimmo Paivasaari, Martti Silvennoinen, Jarno Kaakkunen, and Pasi Vahimaa "Femtosecond laser processing and spatial light modulator", Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 89670F (6 March 2014); https://doi.org/10.1117/12.2044459

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available