Design and fabrication of a gradient-index phononic quartz plate lens

Tsung-Tsong Wu; Meng-Jhen Chiou; Yu-Ching Lin; Takahito Ono

doi:10.1117/12.2047881

19 February 2014 Design and fabrication of a gradient-index phononic quartz plate lens

Tsung-Tsong Wu, Meng-Jhen Chiou, Yu-Ching Lin, Takahito Ono

Proceedings Volume 8994, Photonic and Phononic Properties of Engineered Nanostructures IV; 89940G (2014) https://doi.org/10.1117/12.2047881
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

This paper presents results on the numerical and experimental studies of focusing of Lamb waves in an AT-cut quartz gradient-index phononic crystal (GRIN PC) plate lens. The band structures of square-latticed AT-cut quartz phononic crystal plates with different filling ratios are analyzed using the finite element method. The anisotropic properties of the lowest anti-symmetric Lamb mode are discussed. Then, the design of an AT-cut quartz based GRIN PC plate lens is addressed. In the micro-fabrication, the deep reactive ion etching (Deep-RIE) process with a laboratory-made etcher was utilized to fabricate the GRIN PC plate lens on an 80μm thick AT-cut quartz plate. Interdigital transducers were fabricated directly on the quartz plate to generate plate waves and a vibro-meter was used to detect the wave fields. The measured results on the focusing are in good accordance with the numerical predictions. Results of this study may serve as a basis for developing an active micro plate lens and related devices.

Citation Download Citation

Tsung-Tsong Wu, Meng-Jhen Chiou, Yu-Ching Lin, and Takahito Ono "Design and fabrication of a gradient-index phononic quartz plate lens", Proc. SPIE 8994, Photonic and Phononic Properties of Engineered Nanostructures IV, 89940G (19 February 2014); https://doi.org/10.1117/12.2047881

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