Structural, morphological and infrared detection properties of Mn-Co-Ni-O spinel oxide films

Wei Zhou; Ouyang Cheng; Jing Wu; Yanqing Gao; Zhiming Huang

doi:10.1117/12.2051877

16 December 2013 Structural, morphological and infrared detection properties of Mn-Co-Ni-O spinel oxide films

Wei Zhou, Ouyang Cheng, Jing Wu, Yanqing Gao, Zhiming Huang

Proceedings Volume 9068, Eighth International Conference on Thin Film Physics and Applications; 90681G (2013) https://doi.org/10.1117/12.2051877
Event: Eighth International Conference on Thin Film Physics and Applications (TFPA13), 2013, Shanghai, China

Abstract

Mn-Co-Ni-O spinel oxide materials, with the prototype of AB₂O₄, are excelled in uncooled thermal sensing and infrared detection due to its high absolute NTC value and moderate resistivity at room temperature. In this work, Mn_1.56Co_0.96Ni_0.48O₄ film (MCN-CSD) and Mn_1.40Co_1.00Ni_0.60O₄ (MCN-RF) film are fabricated on amorphous sapphire substrate with chemical solution method (CSD) and radio frequency deposition method (RF), respectively. Morphological characteristics are revealed by SEM graphs. And the result shows that MCN films acquire better crystalline properties and compactness than MCN bulk materials. To verify the excellent features for infrared detection, detectors sized 1mm² × 0.17 μm and 1 mm² × 0.33 μm are fabricated based on MCN-RF and MCN-CSD films, respectively. The excess noise at 11 Hz for each detector has been tested and the Hooge's parameters have been calculated. The MCN films obtained by RF deposition and CSD method both show γ/n value of about 2×10^-21 cm³, an order lower than bulk MCN and amorphous silicon, which indicates great potentials in integrated infrared detection.

Citation Download Citation

Wei Zhou, Ouyang Cheng, Jing Wu, Yanqing Gao, and Zhiming Huang "Structural, morphological and infrared detection properties of Mn-Co-Ni-O spinel oxide films", Proc. SPIE 9068, Eighth International Conference on Thin Film Physics and Applications, 90681G (16 December 2013); https://doi.org/10.1117/12.2051877

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KEYWORDS

Infrared detection

Sensors

Bolometers

Oxides

Infrared detectors

Spinel

Deposition processes

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