Germanium devices for integrated photonic circuits

F. Kenneth Hopkins; Alexander Benken; Kevin M. Walsh; John Jones; Kent Averett

doi:10.1117/12.2061080

18 September 2014 Germanium devices for integrated photonic circuits

F. Kenneth Hopkins, Alexander Benken, Kevin M. Walsh, John Jones, Kent Averett

Proceedings Volume 9226, Nanophotonics and Macrophotonics for Space Environments VIII; 92260I (2014) https://doi.org/10.1117/12.2061080
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

World-wide interest in germanium-on-silicon photonics has grown enormously during the past few years. We report on our study of germanium deposition for which we found that there is potential to engineer films with significant increases in hole mobility. In addition, we report on our development of wet-etch techniques to pattern thin films and to form tapered regions of Ge, both important for the fabrication of Ge photonic devices.

Citation Download Citation

F. Kenneth Hopkins, Alexander Benken, Kevin M. Walsh, John Jones, and Kent Averett "Germanium devices for integrated photonic circuits", Proc. SPIE 9226, Nanophotonics and Macrophotonics for Space Environments VIII, 92260I (18 September 2014); https://doi.org/10.1117/12.2061080

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available