Nanosecond laser-induced nanostructuring of thin metal layers and dielectric surfaces

P. Lorenz; M. Klöppel; M. Ehrhardt; K. Zimmer; Patrick Schwaller

doi:10.1117/12.2079336

12 March 2015 Nanosecond laser-induced nanostructuring of thin metal layers and dielectric surfaces

P. Lorenz, M. Klöppel, M. Ehrhardt, K. Zimmer, Patrick Schwaller

Proceedings Volume 9351, Laser-based Micro- and Nanoprocessing IX; 93511T (2015) https://doi.org/10.1117/12.2079336
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

Nanostructuring of dielectric surfaces has a widespread field of applications. In this work the recently introduced laser method validates this novel concept for complex nanostructuring of dielectric surfaces. This concept combines the mechanism of self-assembly of metal films due to laser irradiation with the concept of laser-assisted transfer of these patterns into the underlying material. The present work focuses on pattern formation in fused silica near the border of the laser spot, where distorted nested ring-like patterns were found in contrast to concentric ring patterns at homogeneous laser irradiation. For the experiments a lateral homogeneous spot of a KrF excimer laser (λ = 248 nm) and a Gaussian beam Yb fiber laser (λ = 1064 nm) was used for irradiation of a thin chromium layer onto fused silica resulting in the formation of different ring structures into the fused silica surface. The obtained structures were analysed by AFM and SEM. It is found that the mechanism comprises laser-induced metal film melting, contraction of the molten metal, and successive transfer of the metal hole geometry to the fused silica. Simulations taking into account the heat and the Navier-Stokes equations were compared with the experimental results. A good agreement of simulation results with experimental data was found. These first results demonstrate that the variation of the laser beam profile allows the local control of the melt dynamics which causes changes of the shape and the size of the ring patterns. Hence, a light-controlled self-assembly is feasible.

Citation Download Citation

P. Lorenz, M. Klöppel, M. Ehrhardt, K. Zimmer, and Patrick Schwaller "Nanosecond laser-induced nanostructuring of thin metal layers and dielectric surfaces", Proc. SPIE 9351, Laser-based Micro- and Nanoprocessing IX, 93511T (12 March 2015); https://doi.org/10.1117/12.2079336

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