A high-resolution detecting system based on machine vision for defects on large aperture and super-smooth surface

Yongying Yang; Limin Zhao; Shitong Wang; Pin Cao; Dong Liu; Lu Li; Lu Yan; Chen Li; Shibing Xie; Yang Li; Yangjie Chen

doi:10.1117/12.2181182

6 March 2015 A high-resolution detecting system based on machine vision for defects on large aperture and super-smooth surface

Yongying Yang, Limin Zhao, Shitong Wang, Pin Cao, Dong Liu, Lu Li, Lu Yan, Chen Li, Shibing Xie, Yang Li, Yangjie Chen

Author Affiliations +

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94462N (2015) https://doi.org/10.1117/12.2181182
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

The high-resolution detecting system based on machine vision for defects on large aperture and super-smooth surface uses a novel ring telecentric lighting optical system detecting the defects on the sample all round and without blind spots. The scattering light induced by surface defects enters the adaptive and highly zoom microscopic scattering dark-field imaging system for defect detecting and then forms digital images. Sub-aperture microscopic scanning sampling and fast stitching on the surface is realized by using precise multi-axis shifting guided scanning system and a standard comparison board based upon binary optics is used to implement fast calibration of micron-dimension defects detected actually. The pattern recognition technology of digital image processing which can automatically output digitalized surface defects statements after scaling is established to comprehensively evaluate defects. This system which can reach micron-dimension defect resolution can achieve detections of large aperture components of 850 mm × 500 mm, solve the durable problem of subjective uncertainty brought in by human visual detection of defects and achieve quantitative detection of defects with machine vision.

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Yongying Yang, Limin Zhao, Shitong Wang, Pin Cao, Dong Liu, Lu Li, Lu Yan, Chen Li, Shibing Xie, Yang Li, and Yangjie Chen "A high-resolution detecting system based on machine vision for defects on large aperture and super-smooth surface", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94462N (6 March 2015); https://doi.org/10.1117/12.2181182

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KEYWORDS

Defect detection

Scattering

Imaging systems

Light scattering

Calibration

Machine vision

Laser scattering

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