Helical structured thin films deposited at a glancing angle

Yi-Jun Jen; Ci-Yao Jheng; San Chan; Chien-Hoa Tseng

doi:10.1117/12.2188187

20 August 2015 Helical structured thin films deposited at a glancing angle

Yi-Jun Jen, Ci-Yao Jheng, San Chan, Chien-Hoa Tseng

Proceedings Volume 9558, Nanostructured Thin Films VIII; 955813 (2015) https://doi.org/10.1117/12.2188187
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

Gold nanohelical structured thin films (NHFs) were tried to be deposited on a glass substrate using glancing angle deposition technique. At a deposition angle of 89°, gold NHFs were fabricated by introducing liquid nitrogen to flow under the backside of BK7 glass substrate holder. The temperature of substrate was reduced to be less than -140°C before deposition. The spin rate was controlled with respect to the deposition rate to grow three different sized nanohelices. The morphology and optical properties of Au NHFs were measured and compared between the three samples. The strong g-factor implies high sensitivity of deposited helixes in biosensing in the future.

Citation Download Citation

Yi-Jun Jen, Ci-Yao Jheng, San Chan, and Chien-Hoa Tseng "Helical structured thin films deposited at a glancing angle", Proc. SPIE 9558, Nanostructured Thin Films VIII, 955813 (20 August 2015); https://doi.org/10.1117/12.2188187

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