Further development of imaging near-field scatterometer

Denise Uebeler; Lukas Pescoller; Cornelius Hahlweg

doi:10.1117/12.2188118

3 September 2015 Further development of imaging near-field scatterometer

Denise Uebeler, Lukas Pescoller, Cornelius Hahlweg

Proceedings Volume 9579, Novel Optical Systems Design and Optimization XVIII; 95790C (2015) https://doi.org/10.1117/12.2188118
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

In continuation of last year’s paper on the use of near field imaging, which basically is a reflective shadowgraph method, for characterization of glossy surfaces like printed matter or laminated material, further developments are discussed. Beside the identification of several types of surfaces and related features, for which the method is applicable, several refinements are introduced. The theory of the method is extended, based on a mixed Fourier optical and geometrical approach, leading to rules of thumb for the resolution to be expected, giving a framework for design. Further, a refined experimental set-up is introduced. Variation of plane of focus and incident angle are used for separation of various the images of he layers of the surface under test, cross and parallel polarization techniques are applied. Finally, exemplary measurement results and examples are included.

Citation Download Citation

Denise Uebeler, Lukas Pescoller, and Cornelius Hahlweg "Further development of imaging near-field scatterometer", Proc. SPIE 9579, Novel Optical Systems Design and Optimization XVIII, 95790C (3 September 2015); https://doi.org/10.1117/12.2188118

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