Preparation and characterization of aluminum oxide/aluminum fluoride mixture coatings for applications in the deep ultraviolet spectral range

Christian Franke; Olaf Stenzel; Steffen Wilbrandt; Norbert Kaiser; Andreas Tünnermann

doi:10.1117/12.2191282

23 September 2015 Preparation and characterization of aluminum oxide/aluminum fluoride mixture coatings for applications in the deep ultraviolet spectral range

Christian Franke, Olaf Stenzel, Steffen Wilbrandt, Norbert Kaiser, Andreas Tünnermann

Author Affiliations +

Proceedings Volume 9627, Optical Systems Design 2015: Advances in Optical Thin Films V; 96271N (2015) https://doi.org/10.1117/12.2191282
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

In the present study the preparation and characterization of Al₂O₃/AlF₃ material mixture coatings is described. The main focus is on the correlation between the optical properties (refractive index, extinction coefficient), elemental composition and mechanical properties, depending on deposition conditions. The thin mixture films prepared with E-Beam gun evaporation with and without plasma ion assistance show a continuous change in the refractive index between the basic materials extrema (n=1.4 - 1.75), depending on the constituents volume filling factors. At the same time, extinction coefficients vary between less than 1x10^-4 and 2x10^-3. In addition, it can be shown that in dependency of the applied plasma ion assistance, the residual stress inside the mixture layers is tunable. Finally, several multilayer coatings has been prepared and investigated.

Citation Download Citation

Christian Franke, Olaf Stenzel, Steffen Wilbrandt, Norbert Kaiser, and Andreas Tünnermann "Preparation and characterization of aluminum oxide/aluminum fluoride mixture coatings for applications in the deep ultraviolet spectral range", Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 96271N (23 September 2015); https://doi.org/10.1117/12.2191282

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