Laser differential reflection-confocal lens thickness measurement

Nan Zhou; Yun Wang; Weiqian Zhao; Lirong Qiu; Lingfeng Chen

doi:10.1117/12.2199689

8 October 2015 Laser differential reflection-confocal lens thickness measurement

Nan Zhou, Yun Wang, Weiqian Zhao, Lirong Qiu, Lingfeng Chen

Proceedings Volume 9677, AOPC 2015: Optical Test, Measurement, and Equipment; 96771I (2015) https://doi.org/10.1117/12.2199689
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

A new laser differential reflection-confocal lens thickness measurement (DRCTM) method is proposed for the high-accuracy measurement of the lens thickness. DRCTM uses the test beam reflected from the lens first and last surface to determine the vertex positions of the two surfaces. Differential confocal technology is used to precisely identify the lens vertexes of the lens first and last surfaces, thereby enabling the precise measurement of the lens thickness. Compared with the existing measurement methods, DRCTM has high accuracy and strong anti-interference capability. Theoretical analysis and experimental results indicate that the DRCTM measurement error can be limited to 0.0015%.

Citation Download Citation

Nan Zhou, Yun Wang, Weiqian Zhao, Lirong Qiu, and Lingfeng Chen "Laser differential reflection-confocal lens thickness measurement", Proc. SPIE 9677, AOPC 2015: Optical Test, Measurement, and Equipment, 96771I (8 October 2015); https://doi.org/10.1117/12.2199689

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