Characterization of surface ablation of dielectrics irradiated by 12-fs laser pulse in air

C. Pasquier; M. Sentis; O. Utéza; N. Sanner

doi:10.1117/12.2208035

14 March 2016 Characterization of surface ablation of dielectrics irradiated by 12-fs laser pulse in air

C. Pasquier, M. Sentis, O. Utéza, N. Sanner

Proceedings Volume 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI; 97350H (2016) https://doi.org/10.1117/12.2208035
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

We develop an experiment of laser-matter interaction in air environment with ultrashort pulses of 12 fs in the context of micromachining. From post-mortem analysis of the sample, we determine the ablation thresholds of fused silica and sapphire exposed to single 12-fs laser pulse. We also analyze the evolution of macroscopic ablation quantities, taking into account the role of nonlinear propagation effects in air prior the target.

Citation Download Citation

C. Pasquier, M. Sentis, O. Utéza, and N. Sanner "Characterization of surface ablation of dielectrics irradiated by 12-fs laser pulse in air", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350H (14 March 2016); https://doi.org/10.1117/12.2208035

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