Subaperture method for aspheric surface metrology using curvature data

SeongWon Lee; WooKyung Jeon; TaeJin Park; ByoungChang Kim; GeonHee Kim; SangWon Hyun; IJong Kim; Seunghyun Kim; ChangKyu Kim; HyungSuk Lee

doi:10.1117/12.2227961

26 April 2016 Subaperture method for aspheric surface metrology using curvature data

SeongWon Lee, WooKyung Jeon, TaeJin Park, ByoungChang Kim, GeonHee Kim, SangWon Hyun, IJong Kim, Seunghyun Kim, ChangKyu Kim, HyungSuk Lee

Author Affiliations +

Proceedings Volume 9890, Optical Micro- and Nanometrology VI; 989018 (2016) https://doi.org/10.1117/12.2227961
Event: SPIE Photonics Europe, 2016, Brussels, Belgium

Abstract

We present a profilometry for measuring aspheric surface, which determines the curvature from the sub-aperture topography along two orthogonal directions and then reconstructs the entire surface profile from the measured curvature data. The entire surface was divided into a number of sub-apertures with overlapping zones. Each sub-aperture was measured using white-light scanning interferometry to avoid any optical alignment error along an optical axis. Simulation studies are also presented based on the mathematical model. The proposed mathematical model was also experimentally tested on freeform surfaces using white-light scanning interferometry under deveolpment.

Citation Download Citation

SeongWon Lee, WooKyung Jeon, TaeJin Park, ByoungChang Kim, GeonHee Kim, SangWon Hyun, IJong Kim, Seunghyun Kim, ChangKyu Kim, and HyungSuk Lee "Subaperture method for aspheric surface metrology using curvature data", Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 989018 (26 April 2016); https://doi.org/10.1117/12.2227961

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