Presentation
1 April 2022 Wafer-scale production of membrane-external-cavity surface-emitting laser (MECSEL) gain chips
Author Affiliations +
Abstract
Membrane-external-cavity surface-emitting lasers (MECSELs) consist of an epitaxial active region directly bonded to at least one transparent heatspreader with external cavity mirrors for feedback. This structure enables significant flexibility in the emission wavelength and yields a standalone laser gain medium amenable to enhanced power scaling via optimized thermal management. We outline a 4” wafer-scale manufacturing process for dual-SiC-heatspreader (SiC/epi/SiC) gain chips, incorporating external dielectric coatings and metallization for intimate mounting to a heatsink. Our process leverages low-temperature wafer bonding in concert with traditional deposition, lithography, and etching steps, allows hundreds of MECSEL gain chips to be simultaneously produced.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Garrett D. Cole, David Follman, Catherine Nguyen, Roman Bek, Michael Zimmer, and Norbert Witz "Wafer-scale production of membrane-external-cavity surface-emitting laser (MECSEL) gain chips", Proc. SPIE PC11984, Vertical External Cavity Surface Emitting Lasers (VECSELs) XI, PC1198404 (1 April 2022); https://doi.org/10.1117/12.2609904
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KEYWORDS
Laser optics

Wafer-level optics

Manufacturing

Microfabrication

Mirrors

Quantum dots

Semiconductor lasers

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