AI process improvements for Ga203

Matthew Putman

doi:10.1117/12.2631672

5 March 2022 AI process improvements for Ga₂0₃

Matthew Putman

Proceedings Volume PC12002, Oxide-based Materials and Devices XIII; PC1200204 (2022) https://doi.org/10.1117/12.2631672
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

Potential applications for gallium oxide, up until now, have far exceeded our ability to scale up production. As one crucial example, gallium oxide as a material in cube satellites has been shown to provide superior climate modeling in the ozone layer. Gallium oxide’s wide bandgap and other favorable properties make it an ideal material for space-based applications. However, scaling gallium oxide production will require innovative methods to reduce defect density. AI analysis of process and optical inspection data, from substrate to device packaging, will allow manufacturers to assign causality to defects and adaptively control the production process to improve quality.

Conference Presentation

Citation Download Citation

Matthew Putman "AI process improvements for Ga₂0₃", Proc. SPIE PC12002, Oxide-based Materials and Devices XIII, PC1200204 (5 March 2022); https://doi.org/10.1117/12.2631672

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