Development of silicon foil X-ray optics using hot plastic deformation process (Conference Presentation)

Masaki Numazawa; Manabu Ishida; Yuichiro Ezoe; Mai Takeo; Asca Miyamoto; Kumi Ishikawa; Kohei Morishita; Kazuo Nakajima

doi:10.1117/12.2665153

7 June 2023 Development of silicon foil X-ray optics using hot plastic deformation process (Conference Presentation)

Masaki Numazawa, Manabu Ishida, Yuichiro Ezoe, Mai Takeo, Asca Miyamoto, Kumi Ishikawa, Kohei Morishita, Kazuo Nakajima

Proceedings Volume PC12576, EUV and X-ray Optics: Synergy between Laboratory and Space VIII; PC1257603 (2023) https://doi.org/10.1117/12.2665153
Event: SPIE Optics + Optoelectronics, 2023, Prague, Czech Republic

Abstract

We have been developing silicon foil X-ray optics using a hot plastic deformation process for future astronomical observations. Our foil mirror is made of a 0.3-mm thick silicon wafer and is plastically deformed into a high-accurate conical shape with a curvature radius of ~100 mm. The angular resolution we evaluated using a test sample mirror was ~32 arcseconds in the best region. We have also successfully coated a platinum film on the foil mirror using the atomic layer deposition process. In this talk, we report on the fabrication method and the X-ray imaging capability of our silicon foil X-ray optics.

Conference Presentation

Citation Download Citation

Masaki Numazawa, Manabu Ishida, Yuichiro Ezoe, Mai Takeo, Asca Miyamoto, Kumi Ishikawa, Kohei Morishita, and Kazuo Nakajima "Development of silicon foil X-ray optics using hot plastic deformation process (Conference Presentation)", Proc. SPIE PC12576, EUV and X-ray Optics: Synergy between Laboratory and Space VIII, PC1257603 (7 June 2023); https://doi.org/10.1117/12.2665153

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