Cavity-enhanced quantitative phase profilometry for high contrast profiling of graphene

Nansen Zhou; Ting Huang; Yujie Nie; Zhaoli Gao; Renjie Zhou

doi:10.1117/12.3008495

13 March 2024 Cavity-enhanced quantitative phase profilometry for high contrast profiling of graphene

Nansen Zhou, Ting Huang, Yujie Nie, Zhaoli Gao, Renjie Zhou

Proceedings Volume PC12852, Quantitative Phase Imaging X; PC128520E (2024) https://doi.org/10.1117/12.3008495
Event: SPIE BiOS, 2024, San Francisco, California, United States

Abstract

Quantitative phase profilometry (QPP) has been recently developed for mapping the thickness profiles of thin films. However, the insufficient signal-to-noise ratio (SNR) has hindered its applicability on thinner structures, e.g., monolayer graphene. Here, we propose and implement a “phase cavity” concept in QPP to amplify the measured phase signal to achieve high contrast and accurate thickness profiling of thin structures. We achieved phase amplification by modulating the oxide film thickness on the silicon substrate and optimizing the illumination wavelength. We obtained the exact thickness profile of monolayer graphene and confirmed it with Raman spectroscopy and atomic force microscopy.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Nansen Zhou, Ting Huang, Yujie Nie, Zhaoli Gao, and Renjie Zhou "Cavity-enhanced quantitative phase profilometry for high contrast profiling of graphene", Proc. SPIE PC12852, Quantitative Phase Imaging X, PC128520E (13 March 2024); https://doi.org/10.1117/12.3008495

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