Exploring spatial phase resolution limit in epi-mode quantitative phase imaging

Nansen Zhou; Renjie Zhou

doi:10.1117/12.3008497

13 March 2024 Exploring spatial phase resolution limit in epi-mode quantitative phase imaging

Nansen Zhou, Renjie Zhou

Proceedings Volume PC12852, Quantitative Phase Imaging X; PC128521Q (2024) https://doi.org/10.1117/12.3008497
Event: SPIE BiOS, 2024, San Francisco, California, United States

Conference Poster

Abstract

The silicon platform has been widely applied in optoelectronics and sensing to attain versatile functions. Epi-mode quantitative phase imaging (QPI) is promising for non-destructive and high-throughput material metrology. However, spatial resolution and its influencing factors have not been fully explored in epi-mode QPI. Here, we propose to explore the spatial phase resolution limit by studying the influencing factors, including object shape, object size, and phase noise. These factors are related to the signal-to-noise ratio (SNR). The phase object distribution is solved from the transfer-matrix model combined with the consideration of the limited aperture of the imaging system. The study may inspire researchers to further enhance the resolvability of QPI by improving image SNR.

Citation Download Citation

Nansen Zhou and Renjie Zhou "Exploring spatial phase resolution limit in epi-mode quantitative phase imaging", Proc. SPIE PC12852, Quantitative Phase Imaging X, PC128521Q (13 March 2024); https://doi.org/10.1117/12.3008497

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