Nanoscale parallel 3D printing based on digital holography

Wen Qi Ouyang; Shih-Chi Chen

doi:10.1117/12.3002688

13 March 2024 Nanoscale parallel 3D printing based on digital holography

Wen Qi Ouyang, Shih-Chi Chen

Proceedings Volume PC12876, Laser 3D Manufacturing XI; PC1287607 (2024) https://doi.org/10.1117/12.3002688
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

We present a multi-focus digital holography-based two-photon lithography (TPL) platform for high-resolution, large-scale 3D nanofabrication. Specifically, up to 2000 individually programmable laser foci are generated and controlled via digital holography and powered by a 1 kHz regenerative femtosecond laser amplifier, which effectively increases the fabrication rate to 2,000,000 voxels/sec with a lateral resolution of 90 nm. We have designed and fabricated a variety of complex 3D structures, e.g., mechanical metastructures, and experimentally verified their properties and mechanical performance. These results show our new platform is a powerful tool for applications in photonics, nanotechnology, and biotechnology.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Wen Qi Ouyang and Shih-Chi Chen "Nanoscale parallel 3D printing based on digital holography", Proc. SPIE PC12876, Laser 3D Manufacturing XI, PC1287607 (13 March 2024); https://doi.org/10.1117/12.3002688

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