Optimisation of dicing parameters for lithium niobate ridge waveguide fabrication

Matthew P. D'Souza; Glenn Churchill; Paul C. Gow; Peter G. R. Smith; Corin B. E. Gawith; James C. Gates

doi:10.1117/12.3003114

13 March 2024 Optimisation of dicing parameters for lithium niobate ridge waveguide fabrication

Matthew P. D'Souza, Glenn Churchill, Paul C. Gow, Peter G. R. Smith, Corin B. E. Gawith, James C. Gates

Proceedings Volume PC12898, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII; PC128980W (2024) https://doi.org/10.1117/12.3003114
Event: SPIE OPTO, 2024, San Francisco, California, United States

Conference Poster

Abstract

We present the results of an extended study on the evolution of dicing blade dynamics to define the tolerances of the ductile regime for dicing optical quality facets with sub-nm surface roughness in optical materials. These results provide a route to determine the critical parameters, such as depth of cut, blade shape, and feed rate, to maintain stable ductile machining within a specific range of conditions. We will discuss our latest results and observations, including optical characterisation of waveguides in lithium niobate and other materials.

Citation Download Citation

Matthew P. D'Souza, Glenn Churchill, Paul C. Gow, Peter G. R. Smith, Corin B. E. Gawith, and James C. Gates "Optimisation of dicing parameters for lithium niobate ridge waveguide fabrication", Proc. SPIE PC12898, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII, PC128980W (13 March 2024); https://doi.org/10.1117/12.3003114

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