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4 October 2024 Deep-UV dielectric metasurfaces for biosensing and optical chirality
Ming Lun Tseng, Bo Ray Lee, Ting An Shu, Shang Jie Shen, Pei Ying Ho, Kuan-Heng Chen, Po Hsiang Hsu, Mao Feng Jiang, Jia Hua Lee, Yao-Wei Huang
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Proceedings Volume PC13115, UV and Higher Energy Photonics: From Materials to Applications 2024; PC131150B (2024) https://doi.org/10.1117/12.3028015
Event: Nanoscience + Engineering, 2024, San Diego, California, United States
Abstract
DUV light is of great importance in applications, including nanolithography, material science, and biology. Metasurfaces, comprising well-engineered nanoresonators, promise to improve DUV technologies due to their capability to manipulate light at the nanoscale. We present metasurfaces showing high-quality-factor resonance (high-Q) in the DUV range. We combined low-loss dielectric materials, resonance mode associated with the quasi-bound state in the continuum, and various device schemes to realize the DUV high-Q metasurfaces. We demonstrate metasurfaces with functionalities including imaging-based biosensing and high-Q optical charity. Fabrication and characterization of the high-Q metasurface will be reported. This work provides a platform to advance DUV nanophotonics in sensing, quantum optics, and nonlinear optics.
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Ming Lun Tseng, Bo Ray Lee, Ting An Shu, Shang Jie Shen, Pei Ying Ho, Kuan-Heng Chen, Po Hsiang Hsu, Mao Feng Jiang, Jia Hua Lee, and Yao-Wei Huang "Deep-UV dielectric metasurfaces for biosensing and optical chirality", Proc. SPIE PC13115, UV and Higher Energy Photonics: From Materials to Applications 2024, PC131150B (4 October 2024); https://doi.org/10.1117/12.3028015
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KEYWORDS
Deep ultraviolet
Dielectrics
Biosensing
Imaging spectroscopy
Biomolecules
Materials properties
Quantum confinement
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