2 August 2024 Adjustable X-ray optics: thin-film actuator measurement and figure correction performance
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Abstract

Several proposed future X-ray missions will require thin (0.5 mm thick) mirrors with precise surface figures to maintain high angular resolution (0.5 arcsec). To study methods of meeting these requirements, adjustable X-ray optics have been fabricated with thin-film piezoelectric actuators to perform figure correction. The fabrication and actuator performance for an adjustable X-ray mirror that forms a conical approximation to a Wolter-I telescope are reported. The individual responses of actuator cells were measured and shown to induce a figure change of 870 nm peak-to-valley on average. These measured responses were compared with predicted responses generated using a finite-element analysis algorithm. On average, the measured and predicted cell responses agreed to within 60 nm root mean square. A set of representative mirror distortions and the measured cell responses were used to simulate figure corrections and calculate the half-power diameter (HPD, single reflection at 1 keV) achieved. These simulations showed an improvement in 4.5 to 9 arcsec mirrors to 0.5 to 1.5 arcsec HPD. The disagreements between the predicted and measured cells’ performance in actuation and figure correction were attributed to a high spatial frequency metrology error and differences in mirror bonding considerations between the finite-element analysis model and the as-built mirror mount.

© 2024 Society of Photo-Optical Instrumentation Engineers (SPIE)
Kenneth Buffo, Casey DeRoo, Paul Reid, Vladimir Kradinov, Vanessa Marquez, Susan Trolier-McKinstry, Nathan Bishop, Thomas N. Jackson, Quyen Tran, Hanyuan Liang, and Mohit Tendulkar "Adjustable X-ray optics: thin-film actuator measurement and figure correction performance," Journal of Astronomical Telescopes, Instruments, and Systems 10(3), 039003 (2 August 2024). https://doi.org/10.1117/1.JATIS.10.3.039003
Received: 6 March 2024; Accepted: 12 July 2024; Published: 2 August 2024
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KEYWORDS
Mirrors

Iterated function systems

X-ray optics

Thin films

Optical testing

Piezoelectric thin film actuators

Ferroelectric materials

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